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A user's guide to ellipsometry

Author: Harland G Tompkins
Publisher: Boston : Academic Press, ©1993.
Edition/Format:   Print book : EnglishView all editions and formats
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Genre/Form: Études de cas
Document Type: Book
All Authors / Contributors: Harland G Tompkins
ISBN: 0126939500 9780126939507
OCLC Number: 1131173485
Description: xv, 260 pages : illustrations
Contents: Ch. 1. Theoretical Aspects. Ch. 2. Instrumentation. Ch. 3. Using Optical Parameters to Determine Material Properties. Ch. 4. Determining Optical Parameters for Inaccessible Substrates and Unknown Films. Ch. 5. Extremely Thin Films. Ch. 6. The Special Case of Polysilicon. Ch. 7. The Effect of Roughness --
Case Studies. Case 1. Dissolution and Swelling of Thin Polymer Films. Case 2. Ion Beam Interaction with Silicon. Case 3. Dry Oxidation of Metals. Case 4. Optical Properties of Sputtered Chromium Suboxide Thin Films. Case 5. Ion-Assisted Film Growth of Zirconium Dioxide. Case 6. Electrochemical/Ellipsometric Studies of Oxides on Metals. Case 7. Amorphous Hydrogenated Carbon Films. Case 8. Fluoropolymer Films on Silicon from Reactive Ion Etching. Case 9. Various Films on InP. Case 10. Benzotriazole and Benzimidazole on Copper. Case 11. Gas Adsorption on Metal Surfaces. Case 12. Silicon-Germanium Thin Films. Case 13. Profiling of HgCdTe. Case 14. Oxides and Nitrides of Silicon --
Appendix A : Del/Psi Trajectory Calculations --
Appendix B : Effective Medium Considerations --
Appendix C : Literature Values of Optical Constants of Various Materials.
Responsibility: Harland G. Tompkins.
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