A user's guide to ellipsometry (Book, 1993) [University of Washington Libraries]
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A user's guide to ellipsometry

Author: Harland G Tompkins
Publisher: Boston : Academic Press, ©1993.
Edition/Format:   Print book : EnglishView all editions and formats

Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement  Read more...

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Genre/Form: Case studies
Cas, Études de
Additional Physical Format: Online version:
Tompkins, Harland G.
User's guide to ellipsometry.
Boston : Academic Press, ©1993
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Harland G Tompkins
ISBN: 0126939500 9780126939507
OCLC Number: 26503363
Description: xv, 260 pages : illustrations ; 24 cm
Contents: Ch. 1. Theoretical Aspects --
Ch. 2. Instrumentation --
Ch. 3. Using Optical Parameters to Determine Material Properties --
Ch. 4. Determining Optical Parameters for Inaccessible Substrates and Unknown Films --
Ch. 5. Extremely Thin Films --
Ch. 6. The Special Case of Polysilicon --
Ch. 7. The Effect of Roughness --
Case Studies --
Case 1. Dissolution and Swelling of Thin Polymer Films --
Case 2. Ion Beam Interaction with Silicon --
Case 3. Dry Oxidation of Metals --
Case 4. Optical Properties of Sputtered Chromium Suboxide Thin Films --
Case 5. Ion-Assisted Film Growth of Zirconium Dioxide --
Case 6. Electrochemical/Ellipsometric Studies of Oxides on Metals --
Case 7. Amorphous Hydrogenated Carbon Films --
Case 8. Fluoropolymer Films on Silicon from Reactive Ion Etching --
Case 9. Various Films on InP --
Case 10. Benzotriazole and Benzimidazole on Copper --
Case 11. Gas Adsorption on Metal Surfaces --
Case 12. Silicon-Germanium Thin Films --
Case 13. Profiling of HgCdTe --
Case 14. Oxides and Nitrides of Silicon --
Appendix A: Del/Psi Trajectory Calculations --
Appendix B: Effective Medium Considerations --
Appendix C: Literature Values of Optical Constants of Various Materials.
Responsibility: Harland G. Tompkins.
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