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A user's guide to ellipsometry 预览资料
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A user's guide to ellipsometry

著者: Harland G Tompkins
出版商: Mineola, N.Y. : Dover Publications, 2006.
版本/格式:   打印图书 : 英语查看所有的版本和格式
提要:
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Fourteen case studies illustrate concepts and applications.
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详细书目

类型/形式: Case studies
Fallstudiensammlung
材料类型: 互联网资源
文档类型 图书, 互联网资源
所有的著者/提供者: Harland G Tompkins
ISBN: 0486450287 9780486450285
OCLC号码: 64511093
注释: Originally published: Boston : Academic Press, ©1993.
描述: xii, 260 pages : illustrations ; 22 cm
内容: Theoretical aspects --
Instrumentation --
Using optical parameters to determine material properties --
Determining optical parameters for inaccessible substrates and unknown films --
Extremely thin films --
The special case of polysilicon --
The effect of roughness --
Dissolution and swelling of thin polymer films --
Ion beam interaction with silicon --
Dry oxidation of metals --
Optical properties of sputtered chromium suboxide thin films --
Ion-assisted film growth of zirconium dioxide --
Electrochemical/ellipsometric studies of oxides on metals --
Amorphous hydrogenated carbon films --
Fluoropolymer films on silicon from reactive ion etching --
Various films on InP --
Benzotriazole and benzimidazole on copper --
Gas adsorption on metal surfaces --
Silicon-germanium thin films --
Profiling of HgCdTe --
Oxides and nitrides of silicon --
Del/psi trajectory calculations --
Effective medium considerations --
Literature values of optical constants of various materials.
责任: Harland G. Tompkins.

摘要:

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Fourteen case studies illustrate concepts and applications.
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