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A user's guide to ellipsometry

Author: Harland G Tompkins
Publisher: Mineola, N.Y. : Dover Publications, 2006.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Fourteen case studies illustrate concepts and applications.
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Details

Genre/Form: Case studies
Fallstudiensammlung
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Harland G Tompkins
ISBN: 0486450287 9780486450285
OCLC Number: 64511093
Notes: Originally published: Boston : Academic Press, ©1993.
Description: xii, 260 pages : illustrations ; 22 cm
Contents: Theoretical aspects --
Instrumentation --
Using optical parameters to determine material properties --
Determining optical parameters for inaccessible substrates and unknown films --
Extremely thin films --
The special case of polysilicon --
The effect of roughness --
Dissolution and swelling of thin polymer films --
Ion beam interaction with silicon --
Dry oxidation of metals --
Optical properties of sputtered chromium suboxide thin films --
Ion-assisted film growth of zirconium dioxide --
Electrochemical/ellipsometric studies of oxides on metals --
Amorphous hydrogenated carbon films --
Fluoropolymer films on silicon from reactive ion etching --
Various films on InP --
Benzotriazole and benzimidazole on copper --
Gas adsorption on metal surfaces --
Silicon-germanium thin films --
Profiling of HgCdTe --
Oxides and nitrides of silicon --
Del/psi trajectory calculations --
Effective medium considerations --
Literature values of optical constants of various materials.
Responsibility: Harland G. Tompkins.

Abstract:

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Fourteen case studies illustrate concepts and applications.
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