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Document Type: | Book |
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All Authors / Contributors: |
Harland G Tompkins |
ISBN: | 0126939500 9780126939507 |
OCLC Number: | 802416413 |
Description: | XV, 260 p. : gràf. ; 24 cm |
Contents: | Theoretical aspects; instrumentation; using optical parameters to determine material properties; determining optical parameters for inaccesible substrates and unknown films; extremely thin films; the special case of polysilicon; the effect of roughness; case studies; chapter references. |
Responsibility: | Harland G. Tompkins. |
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