User's Guide to Ellipsometry. (eBook, 2013) [University of Washington Libraries]
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User's Guide to Ellipsometry.

Author: Harland G Tompkins
Publisher: Dover Publications, 2013.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry - particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to  Read more...
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Details

Genre/Form: Electronic books
Additional Physical Format: Print version:
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Harland G Tompkins
ISBN: 1306366070 9781306366076 9780486151922 0486151921
OCLC Number: 868967236
Description: 1 online resource
Contents: Title Page; Copyright Page; Table of Contents; Preface; Chapter 1 --
Theoretical Aspects; 1.1 Description of an Electromagnetic Wave; 1.2 Interaction of Light with Material; 1.2.1 The Complex Index of Refraction; 1.2.2 Laws of Reflection and Refraction; 1.2.3 Dispersion; 1.2.4 The Effect of Temperature; 1.3 Polarized Light; 1.3.1 Linearly Polarized Light; 1.3.2 Elliptically Polarized Light; 1.4 Reflections; 1.4.1 Coordinate System for Reflections; 1.4.2 Fresnel Reflection Coefficients and the Brewster Angle; 1.4.3 Total Reflection Coefficients for Multiple Interfaces. 1.5 Ellipsometry Definitions1.5.1 Del and Psi; 1.5.2 The Fundamental Equation of Ellipsometry; 1.6 References; Chapter 2 --
Instrumentation; 2.1 Fundamentals and History; 2.2 Optical Elements; 2.2.1 The Light Source; 2.2.2 Polarizers and Analyzers; 2.2.3 The Quarter-Wave Plate; 2.2.4 The Reflection; 2.2.5 The Detector; 2.3 The Manual Null Instrument; 2.3.1 Conceptual; 23.2 Actual Practice; 2.4 Rotating Element Instruments; 2.4.1 The Rotating Null Instrument; 2.4.2 The Photometric Instrument; 2.5 References; Chapter 3 --
Using Optical Parameters to Determine Material Properties. 3.1 Del/Psi and n and k for Substrates3.2 The Calculation of Del/Psi Trajectories for Films on Substrates; 3.3 Trajectories for Transparent Films; 3.4 Trajectories for Absorbing Films; 3.5 Two-Film Structures; 3.5.1 Transparent Films on Top; 3.5.2 Absorbing Films on Top; 3.6 References; Chapter 4 --
Determining Optical Parameters for Inaccessible Substrates and Unknown Films; 4.1 Inaccessible Substrates and Unknown Films; 4.2 Determining Film-Free Values of Del and Psi; 4.2.1 An Example Using One Method; 4.2.2 An Example Using Another Method. 4.3 Determining the Complex Index of Refraction of the Film4.3.1 Description of the Materials for the Example; 4.3.2 Determining the Film-Free Point; 4.3.3 The Film Index; 4.4 Summary; 4.5 References; Chapter 5 --
Extremely Thin Films; 5.1 General Principles; 5.2 Some Examples of Extremely Thin Films; 5.2.1 Oxygen and Carbon Monoxide Adsorption on Silver; 5.2.2 Adsorption of Xe on Ag(111); 5.2.3 Oxidation of Beryllium; 5.3 Summary; 5.4 References; Chapter 6 --
The Special Case of Polysilicon; 6.1 General; 6.2 Range of the Optical Constants; 6.3 Del/Psi Trajectories in General. 6.4 Effect of the Coefficient of Extinction6.5 Effect of the Index of Refraction; 6.6 Requirements; 6.7 Measuring the Thickness of Oxide on Polysilicon; 6.8 Simplifications; 6.9 References; Chapter 7 --
The Effect of Roughness; 7.1 General; 7.2 Macroscopic Roughness; 7.3 Microscopic Roughness; 7.4 Perspective; 7.5 Substrate Roughness; 7.5.1 Near-Dielectric; 7.5.2 Metallic; 7.6 Film Growth with Roughness; 7.6.1 Perspective; 7.6.2 Estimation of Uncertainty; 7.7 References; CASE STUDIES; Case 1: --
Dissolution and Swelling of Thin Polymer Films; C1.1 General; C1.2 Early Work Using a Psi-meter.

Abstract:

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry - particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
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